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dc.provenanceCONICET-
dc.creatorImboden, Matthias-
dc.creatorHan, Han-
dc.creatorStark, Thomas-
dc.creatorLowell, Evan-
dc.creatorChang, Jackson-
dc.creatorPardo, Flavio-
dc.creatorBolle, Cristian-
dc.creatordel Corro, Pablo Guillermo-
dc.creatorBishop, David J.-
dc.date2018-01-22T22:25:34Z-
dc.date2018-01-22T22:25:34Z-
dc.date2014-04-
dc.date2018-01-05T16:26:01Z-
dc.date.accessioned2019-04-29T15:37:00Z-
dc.date.available2019-04-29T15:37:00Z-
dc.date.issued2014-04-
dc.identifierImboden, Matthias ; Han, Han; Stark, Thomas; Lowell, Evan; Chang, Jackson; et al.; Building a Fab on a Chip; Royal Society of Chemistry; Nanoscale; 6; 10; 4-2014; 5049-5062-
dc.identifier2040-3364-
dc.identifierhttp://hdl.handle.net/11336/34219-
dc.identifierCONICET Digital-
dc.identifierCONICET-
dc.identifier.urihttp://rodna.bn.gov.ar:8080/jspui/handle/bnmm/297800-
dc.descriptionSemiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip.-
dc.descriptionFil: Imboden, Matthias. Boston University; Estados Unidos-
dc.descriptionFil: Han, Han. Boston University; Estados Unidos-
dc.descriptionFil: Stark, Thomas. Boston University; Estados Unidos-
dc.descriptionFil: Lowell, Evan. Boston University; Estados Unidos-
dc.descriptionFil: Chang, Jackson. Boston University; Estados Unidos-
dc.descriptionFil: Pardo, Flavio. Bell Labs; Estados Unidos-
dc.descriptionFil: Bolle, Cristian. Bell Labs; Estados Unidos-
dc.descriptionFil: del Corro, Pablo Guillermo. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina-
dc.descriptionFil: Bishop, David J.. Boston University; Estados Unidos-
dc.formatapplication/pdf-
dc.formatapplication/pdf-
dc.languageeng-
dc.publisherRoyal Society of Chemistry-
dc.relationinfo:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org/10.1039/C3NR06087J-
dc.relationinfo:eu-repo/semantics/altIdentifier/url/http://pubs.rsc.org/en/Content/ArticleLanding/2014/NR/C3NR06087J-
dc.rightsinfo:eu-repo/semantics/restrictedAccess-
dc.rightshttps://creativecommons.org/licenses/by-nc-sa/2.5/ar/-
dc.sourcereponame:CONICET Digital (CONICET)-
dc.sourceinstname:Consejo Nacional de Investigaciones Científicas y Técnicas-
dc.sourceinstacron:CONICET-
dc.source.urihttp://hdl.handle.net/11336/34219-
dc.subjectMEMS-
dc.subjectFOC-
dc.subjectNano-materiales-
dc.subjectNanotecnología-
dc.subjectINGENIERÍAS Y TECNOLOGÍAS-
dc.titleBuilding a Fab on a Chip-
dc.typeinfo:eu-repo/semantics/article-
dc.typeinfo:eu-repo/semantics/publishedVersion-
dc.typeinfo:ar-repo/semantics/articulo-
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